发明授权
US09543105B2 Component having a multipactor-inhibiting carbon nanofilm thereon, apparatus including the component, and methods of manufacturing and using the component
有权
具有多反应物抑制碳纳米薄膜的组分，包含该组分的装置，以及制造和使用该组分的方法
- 专利标题： Component having a multipactor-inhibiting carbon nanofilm thereon, apparatus including the component, and methods of manufacturing and using the component
- 专利标题（中）： 具有多反应物抑制碳纳米薄膜的组分，包含该组分的装置，以及制造和使用该组分的方法
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申请号： US14581831申请日： 2014-12-23
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公开(公告)号： US09543105B2公开(公告)日： 2017-01-10
- 发明人: Patrick Fisher , Walter J. Keller, III
- 申请人： Nokomis, Inc.
- 申请人地址： US PA Charleroi
- 专利权人： Nokomis, Inc.
- 当前专利权人： Nokomis, Inc.
- 当前专利权人地址： US PA Charleroi
- 代理机构： The Webb Law Firm
- 主分类号： H01J25/76
- IPC分类号： H01J25/76 ; H01P1/08 ; H01J23/36 ; H01J23/12 ; B82Y30/00 ; B82Y40/00
摘要：
A high power RF energy device component is disclosed that is exposed to high power RF energy in a vacuum environment, and includes a multipactor-inhibiting carbon nanofilm covering at least one surface of the component. A secondary electron efficiency emission (SEE) coefficient of the multipactor inhibiting carbon nanofilm is desirably less than a SEE coefficient of the underlying surface of the component.