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US09548180B2 Nanoparticle-templated lithographic patterning of nanoscale electronic components 有权
纳米尺度电子元件的纳米颗粒模板平版印刷图案

Nanoparticle-templated lithographic patterning of nanoscale electronic components
Abstract:
Some embodiments of vacuum electronics call for nanoscale field-enhancing geometries. Methods and apparatus for using nanoparticles to fabricate nanoscale field-enhancing geometries are described herein. Other embodiments of vacuum electronics call for methods of controlling spacing between a control grid and an electrode on a nano- or micron-scale, and such methods are described herein.
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