Invention Grant
- Patent Title: Method for transferring a layer comprising a compressive stress layer and related structures
- Patent Title (中): 用于转移包含压应力层和相关结构的层的方法
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Application No.: US14377738Application Date: 2013-01-28
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Publication No.: US09548237B2Publication Date: 2017-01-17
- Inventor: Gweltaz Gaudin , Oleg Kononchuk , Ionut Radu
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: SOITEC
- Current Assignee: SOITEC
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1200449 20120216
- International Application: PCT/IB2013/000128 WO 20130128
- International Announcement: WO2013/121260 WO 20130822
- Main IPC: B32B7/04
- IPC: B32B7/04 ; H01L21/762 ; B32B9/04
Abstract:
A method comprising the following steps: providing a support substrate and a donor substrate, forming an embrittlement region in the donor substrate so as to delimit a first portion and a second portion on either side of the embrittlement region, assembling the donor substrate on the support substrate, fracturing the donor substrate along the embrittlement region. In addition, the method comprises a step consisting of forming a compressive stress layer in the donor substrate so as to delimit a so-called confinement region interposed between the compressive stress layer and the embrittlement region.
Public/Granted literature
- US20150364364A1 METHOD FOR TRASFERRING A LAYER Public/Granted day:2015-12-17
Information query
