发明授权
US09548449B2 Conductive oxide random access memory (CORAM) cell and method of fabricating same
有权
导电氧化物随机存取存储器(CORAM)单元及其制造方法
- 专利标题: Conductive oxide random access memory (CORAM) cell and method of fabricating same
- 专利标题(中): 导电氧化物随机存取存储器(CORAM)单元及其制造方法
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申请号: US13925951申请日: 2013-06-25
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公开(公告)号: US09548449B2公开(公告)日: 2017-01-17
- 发明人: Elijah V. Karpov , Brian S. Doyle , Uday Shah , Robert S. Chau
- 申请人: Elijah V. Karpov , Brian S. Doyle , Uday Shah , Robert S. Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L27/24
摘要:
Conductive oxide random access memory (CORAM) cells and methods of fabricating CORAM cells are described. For example, a material layer stack for a memory element includes a first conductive electrode. An insulating layer is disposed on the first conductive oxide and has an opening with sidewalls therein that exposes a portion of the first conductive electrode. A conductive oxide layer is disposed in the opening, on the first conductive electrode and along the sidewalls of the opening. A second electrode is disposed in the opening, on the conductive oxide layer.
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