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US09551856B2 MEMS-released curved image sensor 有权
MEMS发布的曲面图像传感器

MEMS-released curved image sensor
Abstract:
This document describes MEMS-released curved image sensors capable of sensing light from a monocentric lens. This MEMS-released curved image sensor receives light focused on a curved focal surface by releasing a photodetector side of a computing and sensing wafer, such as a Complementary Metal-Oxide Semiconductor (CMOS) sensor. This releasing is effective to allow the photodetector side to conform to the curved focal surface of the monocentric lens. By so doing, the wider field of view, smaller size, and often smaller weight of monocentric lenses can be gained while using generally high-quality, low-cost computing and sensing wafers by processing these wafers to give them a curved surface at which to sense light from a monocentric lens.
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