Invention Grant
- Patent Title: Pressure sensor with geter embedded in membrane
- Patent Title (中): 压力传感器与浸入器嵌入膜
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Application No.: US14340765Application Date: 2014-07-25
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Publication No.: US09557238B2Publication Date: 2017-01-31
- Inventor: Willem Besling , Martijn Goossens , Peter Steeneken , Remco Pijnenburg , Marten Oldsen , Casper van der Avoort
- Applicant: NXP B.V.
- Applicant Address: CH Rapperswil
- Assignee: ams International AG
- Current Assignee: ams International AG
- Current Assignee Address: CH Rapperswil
- Agency: McDermott Will & Emery LLP
- Main IPC: G01L19/04
- IPC: G01L19/04 ; G01L9/12 ; B81C1/00 ; G01L9/00 ; B81B7/00

Abstract:
Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.
Public/Granted literature
- US20160025583A1 CMOS PRESSURE SENSOR WITH GETTER USING TI-W WIRE EMBEDDED IN MEMBRANE Public/Granted day:2016-01-28
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