公开(公告)号：US20150355043A1

公开(公告)日：2015-12-10

申请号：US14718257

申请日：2015-05-21

Applicant: NXP B.V.

Inventor： Peter Steeneken ,  Jozef van Beek ,  Willem Besling

IPC: G01L25/00

CPC classification number: G01L25/00 ,  G01L1/10 ,  G01L1/26 ,  G01Q60/24

Abstract: Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

Abstract translation: 本公开的方面涉及力传感器。 如可以根据一个或多个实施例来实现的，装置包括具有谐振频率的力响应分量，以及用力响应分量来补偿变化的电路。 力响应部件响应于所施加的力，根据容易变动的弹簧常数而移动。 补偿电路基于温度来确定谐振频率下的力响应分量的布朗运动，并且基于确定的布朗运动和力响应分量的运动产生输出。 这种输出表示施加到设备的力。

公开(公告)号：US10267702B2

公开(公告)日：2019-04-23

申请号：US14718257

申请日：2015-05-21

Applicant: NXP B.V.

Inventor： Peter Steeneken ,  Jozef van Beek ,  Willem Besling

IPC: G01L25/00 ,  G01L1/10 ,  G01L1/26 ,  G01Q60/24

Abstract: Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

公开(公告)号：US09557238B2

公开(公告)日：2017-01-31

申请号：US14340765

申请日：2014-07-25

Applicant: NXP B.V.

Inventor： Willem Besling ,  Martijn Goossens ,  Peter Steeneken ,  Remco Pijnenburg ,  Marten Oldsen ,  Casper van der Avoort

IPC: G01L19/04 ,  G01L9/12 ,  B81C1/00 ,  G01L9/00 ,  B81B7/00

CPC classification number: G01L9/12 ,  B81B7/0038 ,  B81C1/00158 ,  B81C1/00285 ,  G01L9/0073 ,  G01L19/04

Abstract: Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

Abstract translation: 各种示例性实施例涉及包括悬浮在空腔上的压敏膜的压力传感器，其中膜通过一组锚固件固定到基底; 以及嵌入膜中的吸气剂材料，其中吸气剂的表面与空腔内的任何气体接触，并且其中吸气剂材料的两个端点通过能够通过衬底导通电流的锚固件附着在衬底上， 通过吸气材料。