Invention Grant
- Patent Title: Vapor compression refrigeration chuck for ion implanters
- Patent Title (中): 用于离子注入机的蒸气压缩制冷卡盘
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Application No.: US12725508Application Date: 2010-03-17
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Publication No.: US09558980B2Publication Date: 2017-01-31
- Inventor: William D. Lee , Ashwin M. Purohit , Marvin R. LaFontaine
- Applicant: William D. Lee , Ashwin M. Purohit , Marvin R. LaFontaine
- Applicant Address: US MA Beverly
- Assignee: AXCELIS TECHNOLOGIES, INC.
- Current Assignee: AXCELIS TECHNOLOGIES, INC.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/683 ; H01J37/20 ; H01J37/317 ; H01L21/67
Abstract:
Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece.
Public/Granted literature
- US20100171044A1 Vapor Compression Refridgeration Chuck for Ion Implanters Public/Granted day:2010-07-08
Information query
IPC分类:
