Invention Grant
- Patent Title: Yellow room system
- Patent Title (中): 黄室系统
-
Application No.: US14363376Application Date: 2012-10-03
-
Publication No.: US09563136B2Publication Date: 2017-02-07
- Inventor: Shiro Hara
- Applicant: National Institute of Advanced Industrial Science and Technology
- Applicant Address: JP Tokyo
- Assignee: National Institute of Advance Industrial Science and Technology
- Current Assignee: National Institute of Advance Industrial Science and Technology
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2011-267029 20111206
- International Application: PCT/JP2012/075681 WO 20121003
- International Announcement: WO2013/084575 WO 20130613
- Main IPC: G03D17/00
- IPC: G03D17/00 ; G03F7/20 ; H01L21/67 ; H01L21/677 ; G21F7/00

Abstract:
Arranging an application apparatus, an exposure apparatus, a developing apparatus, and similar apparatus together within a large yellow room makes it difficult to change a layout in association with a change of a recipe and to streamline a layout area and similar parameter. A yellow room system includes: a plurality of portable unit process apparatuses 50 that each have the same standardized outer shape and include a yellow room configured to shield a exposure light to a photosensitive material formed on a workpiece; conveyance containers 11 and 25 that convey the workpiece between the unit process apparatuses and itself is formed as the yellow room; and a light-shielding coupling structure that couples the unit process apparatus, which is formed on a docking port 56 disposed in the upper portion of a front chamber 80 of the unit process apparatus 50, and the conveyance containers together.
Public/Granted literature
- US20140306124A1 Yellow Room System Public/Granted day:2014-10-16
Information query