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US09564854B2 Photonic degradation monitoring for semiconductor devices 有权
半导体器件的光子劣化监测

Photonic degradation monitoring for semiconductor devices
Abstract:
Methods of testing a semiconductor, and semiconductor testing apparatus, are described. In an example, a method for testing a semiconductor can include applying light on the semiconductor to induce photonic degradation. The method can also include receiving a photoluminescence measurement induced from the applied light from the semiconductor and monitoring the photonic degradation of the semiconductor from the photoluminescence measurement.
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