Invention Grant
- Patent Title: Fluid sensor chip and method for manufacturing the same
- Patent Title (中): 流体传感器芯片及其制造方法
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Application No.: US15136047Application Date: 2016-04-22
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Publication No.: US09568447B2Publication Date: 2017-02-14
- Inventor: Guenther Ruhl , Florian Bachl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Eschweiler & Associates, LLC
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01N27/403 ; G01N33/00 ; H01L51/00
Abstract:
A fluid sensor chip includes an isolator substrate including amorphous carbon, an electrical conductor including graphite and an active material including graphene or carbon nanotubes.
Public/Granted literature
- US20160238549A1 FLUID SENSOR CHIP AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-08-18
Information query
