发明授权
- 专利标题: Magnetoresistive random access memory devices and methods of manufacturing the same
- 专利标题(中): 磁阻随机存取存储器件及其制造方法
-
申请号: US14724725申请日: 2015-05-28
-
公开(公告)号: US09570510B2公开(公告)日: 2017-02-14
- 发明人: Eun-Jung Kim , Se-Myeong Jang , Dae-Ik Kim , Je-Min Park , Yoo-Sang Hwang
- 申请人: Eun-Jung Kim , Se-Myeong Jang , Dae-Ik Kim , Je-Min Park , Yoo-Sang Hwang
- 申请人地址: KR
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR
- 代理机构: Renaissance IP Law Group LLP
- 优先权: KR10-2014-0090858 20140718
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; H01L27/22 ; H01L29/78 ; H01L43/08
摘要:
An MRAM device may include semiconductor structures, a common source region, a drain region, a channel region, gate structures, word line structures, MTJ structures, and bit line structures arranged on a substrate. Each of the semiconductor structures may include a first semiconductor pattern having a substantially linear shape extending in a first direction that is substantially parallel to a top surface of the substrate, and a plurality of second patterns that each extend in a third direction substantially perpendicular to the top surface of the substrate. A common source region and drain region may be formed in each of the semiconductor structures to be spaced apart from each other in the third direction, and the channel region may be arranged between the common source region and the drain region. Gate structures may be formed between adjacent second semiconductor patterns in the second direction. Word line structures may electrically connect gate structures arranged in the first direction to each other. MTJ structures may be electrically connected to corresponding ones of the second semiconductor patterns. Each bit line structure may electrically connect two adjacent MTJ structures in the first direction to each other.
公开/授权文献
信息查询
IPC分类: