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US09570684B2 Method of doping 2-dimensional semiconductor and switching device 有权
掺杂二维半导体和开关器件的方法

Method of doping 2-dimensional semiconductor and switching device
Abstract:
Example embodiments relate to methods of doping a 2-dimensional semiconductor. The method includes forming a semiconductor layer on a substrate, implanting ions into the semiconductor layer, forming a doped layer formed of a 2-dimensional semiconductor layer or an organic semiconductor layer on the semiconductor layer, and doping the doped layer by diffusing the ions of the semiconductor layer into the doped layer through annealing the substrate.
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