Invention Grant
- Patent Title: Integrated circuit configured with two or more single crystal acoustic resonator devices
- Patent Title (中): 集成电路配置有两个或多个单晶声谐振器装置
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Application No.: US14298100Application Date: 2014-06-06
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Publication No.: US09571061B2Publication Date: 2017-02-14
- Inventor: Jeffrey B. Shealy
- Applicant: Akoustis, Inc.
- Applicant Address: US NC Huntersville
- Assignee: AKOUSTIS, INC.
- Current Assignee: AKOUSTIS, INC.
- Current Assignee Address: US NC Huntersville
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/60 ; H03H9/02 ; H03H9/205 ; H03H3/02 ; H03H9/00 ; H03H9/05 ; H03H9/17 ; H03H9/56 ; H01L41/18 ; H01L41/29 ; H03H9/64
Abstract:
A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
Public/Granted literature
- US20150357987A1 INTEGRATED CIRCUIT CONFIGURED WITH TWO OR MORE SINGLE CRYSTAL ACOUSTIC RESONATOR DEVICES Public/Granted day:2015-12-10
Information query
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