Invention Grant
US09574264B2 Method and apparatus for stably evaporation depositing uniform thin films
有权
用于稳定蒸发沉积均匀薄膜的方法和装置
- Patent Title: Method and apparatus for stably evaporation depositing uniform thin films
- Patent Title (中): 用于稳定蒸发沉积均匀薄膜的方法和装置
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Application No.: US14716882Application Date: 2015-05-20
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Publication No.: US09574264B2Publication Date: 2017-02-21
- Inventor: Shih-Chang Liang , Wei-Chieh Huang , Chao-Nan Wei , Cuo-Yo Ni , Hui-Yun Bor
- Applicant: NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: TW Taoyuan
- Assignee: NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: TW Taoyuan
- Agent Leong C. Lei
- Priority: TW103134501A 20141003
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C14/24

Abstract:
In a method for evaporation depositing uniform thin films, a film is deposited on a substrate of a vacuum environment while maintaining a constant deposition rate. A cover is installed on a wall of the evaporation vessel. When the evaporation material is heated to an evaporation state and the interior of the evaporation vessel reaches a first vapor saturation pressure, the vapor of the evaporation material flows towards a pressure stabilizing chamber. When the pressure stabilizing chamber reaches a second vapor saturation pressure which is smaller than the first vapor saturation pressure, the vacuum environment has a vacuum background pressure which is smaller than the second vapor saturation pressure, so that the evaporation material vapor flows from the pressure stabilizing chamber towards the vacuum environment at constant rate due to the pressure difference, so as to evaporate the substrate.
Public/Granted literature
- US20160097117A1 METHOD AND APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS Public/Granted day:2016-04-07
Information query
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