Invention Grant
- Patent Title: MEMS angular inertial sensor operating in tuning fork mode
- Patent Title (中): MEMS角惯性传感器在音叉模式下工作
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Application No.: US14750862Application Date: 2015-06-25
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Publication No.: US09574879B2Publication Date: 2017-02-21
- Inventor: Bernard Chaumet , Fabien Filhol , Claude Rougeot , Bertrand Leverrier
- Applicant: THALES
- Applicant Address: FR Courbevoie
- Assignee: THALES
- Current Assignee: THALES
- Current Assignee Address: FR Courbevoie
- Agency: Baker & Hostetler LLP
- Priority: FR1401451 20140627
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747 ; G01C19/574

Abstract:
A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness springs in X and Y, and at least excitation transducers and detection transducers disposed on at least one of the masses. The mobile assembly consisting of a vibrating mass and the parts of transducers fastened to this mass has a generally symmetric structure with respect to an axis of symmetry OX and with respect to an axis of symmetry OY.
Public/Granted literature
- US20150377621A1 MEMS ANGULAR INERTIAL SENSOR OPERATING IN TUNING FORK MODE Public/Granted day:2015-12-31
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