Invention Grant
US09574879B2 MEMS angular inertial sensor operating in tuning fork mode 有权
MEMS角惯性传感器在音叉模式下工作

MEMS angular inertial sensor operating in tuning fork mode
Abstract:
A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness springs in X and Y, and at least excitation transducers and detection transducers disposed on at least one of the masses. The mobile assembly consisting of a vibrating mass and the parts of transducers fastened to this mass has a generally symmetric structure with respect to an axis of symmetry OX and with respect to an axis of symmetry OY.
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