A wafer level chip scale package (WLCSP) includes a semiconductor substrate, a back end of line (BEOL) layer on the semiconductor substrate and having a peripheral edge recessed inwardly from an adjacent peripheral edge of the semiconductor substrate. A first dielectric layer is over the BEOL layer and wraps around the peripheral edge of the BEOL layer. A redistribution layer is over the first dielectric layer and a second dielectric layer is over the redistribution layer.