Invention Grant
US09577025B2 Metal-insulator-metal (MIM) capacitor in redistribution layer (RDL) of an integrated device 有权
集成器件再分配层(RDL)中的金属绝缘体金属(MIM)电容器

Metal-insulator-metal (MIM) capacitor in redistribution layer (RDL) of an integrated device
Abstract:
Some features pertain to an integrated device that includes a substrate, several metal layers coupled to the substrate, several dielectric layers coupled to the substrate, and a redistribution portion coupled to one of the metal layers. The redistribution portion includes a first metal redistribution layer, an insulation layer coupled to the first metal redistribution layer, and a second metal redistribution layer coupled to the insulation layer. The first metal redistribution layer, the insulation layer, and the second metal redistribution layer are configured to operate as a capacitor in the integrated device. In some implementations, the capacitor is a metal-insulator-metal (MIM) capacitor.
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