Invention Grant
- Patent Title: Piezoresistive resonator with multi-gate transistor
- Patent Title (中): 具有多栅极晶体管的压阻谐振器
-
Application No.: US14778726Application Date: 2013-06-29
-
Publication No.: US09577060B2Publication Date: 2017-02-21
- Inventor: Raseong Kim , Ian A. Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- International Application: PCT/US2013/048791 WO 20130629
- International Announcement: WO2014/209403 WO 20141231
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H01L29/423 ; H03H9/02 ; H01L27/088 ; H03H9/17

Abstract:
An embodiment includes a first nonplanar transistor including a first fin that includes first source and drain nodes, and a first channel between the first source and drain nodes; a second nonplanar transistor including a second fin that includes second source and drain nodes, and a second channel between the second source and drain nodes; a nonplanar gate on the first fin between the first source and drain nodes and on the second fin between the second source and drain nodes; and first insulation included between the gate and the first fin and second insulation between the gate and the second fin; wherein the gate mechanically resonates at a first frequency when at least one of the gate and the first fin is actuated with alternating current (AC) to produce periodic forces on the gate. Other embodiments are described herein.
Public/Granted literature
- US20160056252A1 PIEZORESISTIVE RESONATOR WITH MULTI-GATE TRANSISTOR Public/Granted day:2016-02-25
Information query