Invention Grant
US09581842B2 Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same
有权
用于检测缺陷基板的液晶调制器和具有该液晶调制器的检查装置
- Patent Title: Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same
- Patent Title (中): 用于检测缺陷基板的液晶调制器和具有该液晶调制器的检查装置
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Application No.: US14247873Application Date: 2014-04-08
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Publication No.: US09581842B2Publication Date: 2017-02-28
- Inventor: Suk Choi , Sung-Mo Gu , Youngjin Noh , Youngwon Kim , Changhyun Ryu , Chi Youn Chung , Seunghee Lee , Young Eun Choi
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do KR Suwon-si, Gyeonggi-do KR Deonju-si, Jeonbuk
- Assignee: SAMSUNG DISPLAY CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.,INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY
- Current Assignee: SAMSUNG DISPLAY CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.,INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY
- Current Assignee Address: KR Yongin, Gyeonggi-Do KR Suwon-si, Gyeonggi-do KR Deonju-si, Jeonbuk
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2013-0112696 20130923
- Main IPC: G02F1/13
- IPC: G02F1/13 ; G01N21/88 ; G02F1/1337 ; G01N21/95
Abstract:
An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.
Public/Granted literature
- US20150085200A1 LIQUID CRYSTAL MODULATOR FOR DETECTING A DEFECTIVE SUBSTRATE AND INSPECTION APPARATUS HAVING THE SAME Public/Granted day:2015-03-26
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