Invention Grant
US09582629B2 Methods of generating circuit layouts using self-alligned double patterning (SADP) techniques
有权
使用自偏转双重图案(SADP)技术生成电路布局的方法
- Patent Title: Methods of generating circuit layouts using self-alligned double patterning (SADP) techniques
- Patent Title (中): 使用自偏转双重图案(SADP)技术生成电路布局的方法
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Application No.: US14245868Application Date: 2014-04-04
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Publication No.: US09582629B2Publication Date: 2017-02-28
- Inventor: Lei Yuan , Li Yang , Jongwook Kye
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: H01L21/76
- IPC: H01L21/76 ; G06F17/50

Abstract:
At least one method disclosed herein involves creating an overall pattern layout for an integrated circuit that is to be manufactured using a self-aligned double patterning (SADP) process, forming a first metal feature having a first width on a first track of a metal layer using the SADP process, forming a second metal feature having a second width on a second track of the metal layer. The second track is adjacent to the first track. The method also includes forming an electrical connection between the first metal feature and the second metal feature to provide an effectively single metal pattern having a third width that is the sum of the first and second widths, rendering the first and second features decomposable using the SADP process; and decomposing the overall pattern layout with the first and second metal features into a mandrel mask pattern and a block mask pattern.
Public/Granted literature
- US20150286764A1 METHODS OF GENERATING CIRCUIT LAYOUTS USING SELF-ALLIGNED DOUBLE PATTERNING (SADP) TECHNIQUES Public/Granted day:2015-10-08
Information query
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