发明授权
US09582631B2 Method and system for template pattern optimization for DSA patterning using graphoepitaxy
有权
用于使用graphoepitaxy进行DSA图案化的模板图案优化的方法和系统
- 专利标题: Method and system for template pattern optimization for DSA patterning using graphoepitaxy
- 专利标题(中): 用于使用graphoepitaxy进行DSA图案化的模板图案优化的方法和系统
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申请号: US14750742申请日: 2015-06-25
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公开(公告)号: US09582631B2公开(公告)日: 2017-02-28
- 发明人: Michael A. Guillorn , Kafai Lai , Melih Ozlem , Hsinyu Tsai
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Ryan, Mason & Lewis, LLP
- 代理商 Louis J. Percello
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method for design template pattern optimization, comprises receiving a design for a fin field effect transistor (FinFET) device, wherein the design includes a configuration of fins, creating a design template pattern for the design for use in connection with directed self-assembly (DSA) patterning using graphoepitaxy, and optimizing the design template pattern to minimize pattern density gradients, wherein the design template pattern includes a plurality of guiding lines for guiding a block-copolymer deposited during the DSA patterning and the optimizing comprises altering the guiding lines.
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