Invention Grant
US09584889B2 System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille
有权
具有嵌入布置,MEMS模具和格栅的封装MEMS器件的系统和方法
- Patent Title: System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille
- Patent Title (中): 具有嵌入布置,MEMS模具和格栅的封装MEMS器件的系统和方法
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Application No.: US14011566Application Date: 2013-08-27
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Publication No.: US09584889B2Publication Date: 2017-02-28
- Inventor: Irmgard Escher-Poeppel , Edward Fuergut , Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H04R1/02 ; H04R19/00 ; H04R31/00 ; H04R1/08

Abstract:
A packaged MEMS device may include an embedding arrangement, a MEMS device disposed in the embedding arrangement, a sound port disposed in the embedding arrangement and acoustically coupled to the MEMS device, and a grille within the sound port. Some embodiments relate to a sound transducer component including an embedding material and a substrate-stripped MEMS die embedded into the embedding material. The MEMS die may include a diaphragm for sound transduction. The sound transducer component may further include a sound port within the embedding material in fluidic or acoustic contact with the diaphragm. Further embodiments relate to a method for packaging a MEMS device or to a method for manufacturing a sound transducer component.
Public/Granted literature
- US20150061048A1 Packaged MEMS Device Public/Granted day:2015-03-05
Information query
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