Invention Grant
US09584889B2 System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille 有权
具有嵌入布置,MEMS模具和格栅的封装MEMS器件的系统和方法

System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille
Abstract:
A packaged MEMS device may include an embedding arrangement, a MEMS device disposed in the embedding arrangement, a sound port disposed in the embedding arrangement and acoustically coupled to the MEMS device, and a grille within the sound port. Some embodiments relate to a sound transducer component including an embedding material and a substrate-stripped MEMS die embedded into the embedding material. The MEMS die may include a diaphragm for sound transduction. The sound transducer component may further include a sound port within the embedding material in fluidic or acoustic contact with the diaphragm. Further embodiments relate to a method for packaging a MEMS device or to a method for manufacturing a sound transducer component.
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