发明授权
- 专利标题: Polishing device and method for polishing semiconductor wafer
- 专利标题(中): 抛光装置及抛光半导体晶片的方法
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申请号: US14633907申请日: 2015-02-27
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公开(公告)号: US09586303B2公开(公告)日: 2017-03-07
- 发明人: Shiguma Kato
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Minato-ku
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2014-185990 20140912
- 主分类号: B24B49/04
- IPC分类号: B24B49/04 ; B24B37/005 ; B24B37/04 ; B24B21/06 ; B24B21/18 ; H01L21/321
摘要:
According to one embodiment, a polishing device includes a stage, a polishing unit, a warp suppressing unit, and an adsorbing mechanism. A semiconductor wafer is mounted onto the stage. The stage is rotatable around a first shaft. The polishing unit applies a force to and polishes a rear surface of the semiconductor wafer mounted on the stage. The warp suppressing unit applies a force to, during the polishing, an outer circumferential part of a front surface of the semiconductor wafer. The adsorbing mechanism adsorbs, during the polishing, a first region in the rear surface of the semiconductor wafer. The first region is on a center side relative to an area at which the polishing is performed.
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