Invention Grant
- Patent Title: Micro-electromechanical apparatus with multiple chambers and method for manufacturing the same
- Patent Title (中): 具有多个腔室的微机电设备及其制造方法
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Application No.: US14588983Application Date: 2015-01-05
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Publication No.: US09586815B2Publication Date: 2017-03-07
- Inventor: Chung-Yuan Su , Chin-Fu Kuo , Tzung-Ching Lee , Chao-Ta Huang
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW103139411A 20141113
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00
Abstract:
A micro-electromechanical apparatus with multiple chambers and a method for manufacturing the same are provided, wherein various micro-electromechanical sensors are integrated into a single apparatus. For example, the micro-electromechanical apparatus in this disclosure may have two independent hermetically sealed chambers with different pressures, such that a micro-electromechanical barometer and a micro-electromechanical accelerometer can be operated in an optimal pressure circumstance.
Public/Granted literature
- US20160137491A1 MICRO-ELECTROMECHANICAL APPARATUS WITH MULTIPLE CHAMBERS AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-05-19
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