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1.发明授权公开(公告)号：US09586815B2
公开(公告)日：2017-03-07
申请号：US14588983
申请日：2015-01-05
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Tzung-Ching Lee , Chao-Ta Huang
CPC classification number: B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2203/0127 , B81B2203/04 , B81C2203/0109
Abstract: A micro-electromechanical apparatus with multiple chambers and a method for manufacturing the same are provided, wherein various micro-electromechanical sensors are integrated into a single apparatus. For example, the micro-electromechanical apparatus in this disclosure may have two independent hermetically sealed chambers with different pressures, such that a micro-electromechanical barometer and a micro-electromechanical accelerometer can be operated in an optimal pressure circumstance.
Abstract translation: 提供具有多个室的微机电装置及其制造方法，其中各种微机电传感器集成到单个装置中。 例如，本公开中的微机电装置可以具有两个独立的密封室，其具有不同的压力，使得微机电气压计和微机电加速计可以在最佳压力环境中操作。
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公开(公告)号：US12209888B2
公开(公告)日：2025-01-28
申请号：US18097149
申请日：2023-01-13
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Lu-Pu Liao , Yu-Sheng Lin , Liang-Ying Liu , Chin-Fu Kuo
IPC: G01D5/24
Abstract: A reading device for capacitive sensing element comprises a differential capacitive sensing element, a modulator, a charge-voltage conversion circuit, a phase adjustment circuit, a demodulator and a low-pass filter. The modulator outputs a modulation signal to the common node of the capacitive sensing element and modulates the output signal of the capacitive sensing element. The two input terminals of the charge-to-voltage conversion circuit are connected to two non-common nodes of the capacitive sensing element. The charge-to-voltage converter read the output charge of the capacitive sensing element and convert it into a voltage signal. The modulator generates a demodulation signal through the phase adjustment circuit. The demodulator receives the demodulation signal from the phase adjustment circuit and demodulates the output of the charge-to-voltage conversion circuit. The low-pass filter is connected to the output of the demodulator for filtering the demodulated voltage signal to output the read signal.
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公开(公告)号：US20180186624A1
公开(公告)日：2018-07-05
申请号：US15393268
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chin-Fu Kuo , Chao-Ta Huang
IPC: B81B3/00
CPC classification number: B81B3/0072
Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.
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公开(公告)号：US10011476B1
公开(公告)日：2018-07-03
申请号：US15393268
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chin-Fu Kuo , Chao-Ta Huang
IPC: B81B3/00
Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.
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公开(公告)号：US12025588B2
公开(公告)日：2024-07-02
申请号：US17539686
申请日：2021-12-01
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Liang-Ying Liu , Chao-Ta Huang
Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.
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Patent Agency Ranking
公开(公告)号：US10730744B2
公开(公告)日：2020-08-04
申请号：US16235054
申请日：2018-12-28
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Yu-Wen Hsu , Che-Kai Yeh , Chin-Fu Kuo , Chao-Ta Huang
Abstract: A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.
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公开(公告)号：US11815369B2
公开(公告)日：2023-11-14
申请号：US17863341
申请日：2022-07-12
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Lu-Po Liao , Chin-Fu Kuo , Liang-Ying Liu , Yu-Sheng Lin
CPC classification number: G01D5/24 , G01R27/2605 , G01D18/00 , G01R35/005
Abstract: The differential capacitor device includes a differential capacitor sensing component, a calibration capacitor assembly and two output terminals. The differential capacitive sensing element has a common point terminal, a first non-common point terminal and a second non-common point terminal, and the common point terminal is configured to receive an input voltage. The calibration capacitor assembly has a first calibration capacitor and a second calibration capacitor, one terminal of the calibration capacitor assembly is coupled to the first non-common point terminal and the second non-common point terminal, and the other terminal of the calibration capacitor assembly is configured to receive a first calibration voltage and a second calibration voltage. The two output terminals are respectively coupled to the first non-common point terminal and the second non-common point terminal to output a first signal and a second signal.
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8.发明申请公开(公告)号：US20160137491A1
公开(公告)日：2016-05-19
申请号：US14588983
申请日：2015-01-05
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Tzung-Ching Lee , Chao-Ta Huang
CPC classification number: B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2203/0127 , B81B2203/04 , B81C2203/0109
Abstract: A micro-electromechanical apparatus with multiple chambers and a method for manufacturing the same are provided, wherein various micro-electromechanical sensors are integrated into a single apparatus. For example, the micro-electromechanical apparatus in this disclosure may have two independent hermetically sealed chambers with different pressures, such that a micro-electromechanical barometer and a micro-electromechanical accelerometer can be operated in an optimal pressure circumstance.
Abstract translation: 提供具有多个室的微机电装置及其制造方法，其中各种微机电传感器集成到单个装置中。 例如，本公开中的微机电装置可以具有两个独立的密封室，其具有不同的压力，使得微机电气压计和微机电加速计可以在最佳压力环境中操作。
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公开(公告)号：US09227840B2
公开(公告)日：2016-01-05
申请号：US14487104
申请日：2014-09-16
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Chih-Yuan Chen , Chao-Ta Huang
IPC: H01L43/06 , B81B7/00 , G01P15/00 , G01R33/00 , G01R33/028
CPC classification number: B81B7/008 , B81B2201/0228 , B81B2201/025 , B81B2203/0109 , G01P15/00 , G01P15/124 , G01P15/125 , G01P2015/0831 , G01P2015/0834 , G01R33/00 , G01R33/0286
Abstract: A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.
Abstract translation: 提供具有PN结的微机电装置。 微机电装置包括可移动质量块，导电层和电极。 可移动块包括P型半导体层和N型半导体层。 在P型半导体层和N型半导体层之间形成PN结。 微电子机械装置能够在交流电流通过导电层时消除异常电压信号。 微机电装置适用于测量加速度和磁场。 微电机械装置可以是其他类型的微电机械装置，例如微机电扫描微镜。
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公开(公告)号：US20150183632A1
公开(公告)日：2015-07-02
申请号：US14487104
申请日：2014-09-16
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Chih-Yuan Chen , Chao-Ta Huang
IPC: B81B3/00
CPC classification number: B81B7/008 , B81B2201/0228 , B81B2201/025 , B81B2203/0109 , G01P15/00 , G01P15/124 , G01P15/125 , G01P2015/0831 , G01P2015/0834 , G01R33/00 , G01R33/0286
Abstract: A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.
Abstract translation: 提供具有PN结的微机电装置。 微机电装置包括可移动质量块，导电层和电极。 可移动块包括P型半导体层和N型半导体层。 在P型半导体层和N型半导体层之间形成PN结。 微电子机械装置能够在交流电流通过导电层时消除异常电压信号。 微机电装置适用于测量加速度和磁场。 微电机械装置可以是其他类型的微电机械装置，例如微机电扫描微镜。
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