发明授权
- 专利标题: High speed high resolution heterodyne interferometric method and system
- 专利标题(中): 高速高分辨率外差干涉法和系统
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申请号: US14378880申请日: 2012-11-08
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公开(公告)号: US09587927B2公开(公告)日: 2017-03-07
- 发明人: Jiubin Tan , Pengcheng Hu , Xiaofei Diao
- 申请人: HARBIN INSTITUTE OF TECHNOLOGY
- 申请人地址: CN Nangang District, Harbin, Heilongjiang
- 专利权人: HARBIN INSTITUTE OF TECHNOLOGY
- 当前专利权人: HARBIN INSTITUTE OF TECHNOLOGY
- 当前专利权人地址: CN Nangang District, Harbin, Heilongjiang
- 代理机构: Global IP Services
- 代理商 Tianhua Gu
- 优先权: CN201210347063 20120919
- 国际申请: PCT/CN2012/084266 WO 20121108
- 国际公布: WO2014/043984 WO 20140327
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J9/04 ; G01B11/14 ; G02B27/28
摘要:
A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.
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