公开(公告)号：US09587927B2

公开(公告)日：2017-03-07

申请号：US14378880

申请日：2012-11-08

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiubin Tan ,  Pengcheng Hu ,  Xiaofei Diao

IPC: G01B9/02 ,  G01J9/04 ,  G01B11/14 ,  G02B27/28

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02045 ,  G01B11/14 ,  G01B2290/70 ,  G01J9/04 ,  G02B27/283

Abstract: A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.

Abstract translation: 提供了高速高分辨率外差干涉法和系统。 本发明使用具有稍微不同频率的两个空间分离的波束，并且具有相反多普勒频移的两个测量信号。 开关电路根据目标运动的方向和速度选择两个测量信号中的一个用于位移测量。 在本发明中，测量对热变化不敏感; 通过使用两个空间分离的光束基本上消除了周期性非线性; 干涉仪的可测量目标速度不再受激光源的拍频的限制。

公开(公告)号：US20150043004A1

公开(公告)日：2015-02-12

申请号：US14378880

申请日：2012-11-08

Applicant: HARBIN INSTITUTE OF TECHNOLOGY

Inventor： Jiubin Tan ,  Pengcheng Hu ,  Xiaofei Diao

IPC: G01B9/02 ,  G01B11/14

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02045 ,  G01B11/14 ,  G01B2290/70 ,  G01J9/04 ,  G02B27/283

Abstract: A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.

Abstract translation: 提供了高速高分辨率外差干涉法和系统。 本发明使用具有稍微不同频率的两个空间分离的波束，并且具有相反多普勒频移的两个测量信号。 开关电路根据目标运动的方向和速度选择两个测量信号中的一个用于位移测量。 在本发明中，测量对热变化不敏感; 通过使用两个空间分离的光束基本上消除了周期性非线性; 干涉仪的可测量目标速度不再受激光源的拍频的限制。