Invention Grant
US09588296B2 Semiconductor optical waveguide device 有权
半导体光波导器件

Semiconductor optical waveguide device
Abstract:
A semiconductor waveguide optical device and a method of manufacturing of a semiconductor optical device are disclosed. The semiconductor waveguide optical device may include a gradient index waveguide for mode conversion and/or vertical translation of optical modes of step-index waveguides, which may be disposed on or over a same substrate as the gradient index waveguide. The gradient index waveguide may be epitaxially grown.
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