Invention Grant
- Patent Title: System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production
- Patent Title (中): 系统和方法适应性地预补偿目标材料推出,以优化极紫外光生产
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Application No.: US14995166Application Date: 2016-01-13
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Publication No.: US09588430B2Publication Date: 2017-03-07
- Inventor: Jeroen van der Burgt , Matthew R. Graham , Charles Kinney , Wayne J. Dunstan
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Gard & Kaslow LLP
- Main IPC: H05H1/24
- IPC: H05H1/24 ; G03F7/20 ; B05B17/00 ; H05G2/00

Abstract:
Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam is focused on droplets of target material to generate plasma at a primary focal spot. Maintaining droplets at the primary focal spot during burst firing is difficult because generated plasma from preceding droplets push succeeding droplets out of the primary focal spot. Current droplet-to-droplet feedback control to re-align droplets to the primary focal spot is relatively slow. The system and method described herein adaptively pre-compensate for droplet push-out by directing droplets to a target position that is offset from the primary focal spot such that when a droplet is lased, the droplet is pushed by the laser beam into the primary focal spot to generate plasma. Over time, the EUV system learns to maintain real-time alignment of droplet position so plasma is generated consistently within the primary focal spot.
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