Invention Grant
US09588437B2 Fluid handling structure, a lithographic apparatus and a device manufacturing method 有权
流体处理结构,光刻设备和装置制造方法

Fluid handling structure, a lithographic apparatus and a device manufacturing method
Abstract:
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary from a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; and a plurality of gas supply openings in a linear array at least partly surrounding and radially outward of the one or more meniscus pinning features, wherein the plurality of gas supply openings in a linear array are of a similar or the same size.
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