Invention Grant
- Patent Title: Interdigitated capacitor to integrate with flash memory
- Patent Title (中): 交错电容器与闪存集成
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Application No.: US14851284Application Date: 2015-09-11
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Publication No.: US09590059B2Publication Date: 2017-03-07
- Inventor: Harry-Hak-Lay Chuang , Yu-Hsiung Wang , Chen-Chin Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/41
- IPC: H01L29/41 ; H01L29/423 ; H01L29/40 ; H01L27/06 ; H01L27/115 ; H01L49/02

Abstract:
Some embodiments relate to an integrated circuit (IC). The IC includes a semiconductor substrate including a flash memory region and a capacitor region. A flash memory cell is arranged over the flash memory region and includes a polysilicon select gate arranged between first and second source/drain regions of the flash memory cell. The flash memory cell also includes a control gate arranged alongside the select gate and separated from the select gate by a control gate dielectric layer. A capacitor is arranged over the capacitor region and includes: a polysilicon first capacitor plate and polysilicon second capacitor plate, which are inter-digitated with one another and separated from one another by a capacitor dielectric layer. The capacitor dielectric layer and control gate dielectric layer are made of the same material.
Public/Granted literature
- US20160190143A1 INTERDIGITATED CAPACITOR TO INTEGRATE WITH FLASH MEMORY Public/Granted day:2016-06-30
Information query
IPC分类: