Invention Grant
- Patent Title: Micromechanical component and method for producing a micromechanical component
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US13318435Application Date: 2010-04-07
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Publication No.: US09593011B2Publication Date: 2017-03-14
- Inventor: Julian Gonska , Heribert Weber
- Applicant: Julian Gonska , Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agent Gerard Messina
- Priority: DE102009026628 20090602
- International Application: PCT/EP2010/054584 WO 20100407
- International Announcement: WO2010/139499 WO 20101209
- Main IPC: B81B1/00
- IPC: B81B1/00 ; B81C1/00 ; B81B7/00

Abstract:
A method is described for producing a micromechanical component. The method includes providing a first substrate, providing a second substrate, developing a projecting patterned element on the second substrate, and connecting the first and the second substrate via the projecting patterned element. The method provides that the connecting of the first and the second substrate includes eutectic bonding. Also described is a micromechanical component, in which a first and a second substrate are connected to each other.
Public/Granted literature
- US20120045628A1 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT Public/Granted day:2012-02-23
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