Invention Grant
- Patent Title: Ionization gauge for high pressure operation
- Patent Title (中): 用于高压操作的电离计
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Application No.: US14377449Application Date: 2013-02-07
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Publication No.: US09593996B2Publication Date: 2017-03-14
- Inventor: Gerardo A. Brucker
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- International Application: PCT/US2013/025198 WO 20130207
- International Announcement: WO2013/119851 WO 20130815
- Main IPC: H01J27/02
- IPC: H01J27/02 ; B01D59/44 ; G01L19/06 ; G01L21/32 ; H01J41/04 ; G01L21/30 ; H01J1/52 ; H01J41/02

Abstract:
An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
Public/Granted literature
- US20150300904A1 IONIZATION GAUGE FOR HIGH PRESSURE OPERATION Public/Granted day:2015-10-22
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