Invention Grant
- Patent Title: Method of making a suspended membrane device
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Application No.: US14679906Application Date: 2015-04-06
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Publication No.: US09598278B2Publication Date: 2017-03-21
- Inventor: Olivier Le Neel , Tien Choy Loh
- Applicant: STMICROELECTRONICS PTE LTD
- Applicant Address: SG Singapore
- Assignee: STMICROELECTRONICS PTE LTD.
- Current Assignee: STMICROELECTRONICS PTE LTD.
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L27/14 ; B81C1/00 ; B81B3/00

Abstract:
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.
Public/Granted literature
- US20150210539A1 METHOD OF MAKING A SUSPENDED MEMBRANE DEVICE Public/Granted day:2015-07-30
Information query
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