- 专利标题: Apparatus for producing aligned carbon nanotube aggregates
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申请号: US13148619申请日: 2010-02-08
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公开(公告)号: US09598285B2公开(公告)日: 2017-03-21
- 发明人: Akiyoshi Shibuya , Keiichi Kawata , Kenji Hata , Motoo Yumura
- 申请人: Akiyoshi Shibuya , Keiichi Kawata , Kenji Hata , Motoo Yumura
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: ZEON CORPORATION,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人: ZEON CORPORATION,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2009-029128 20090210
- 国际申请: PCT/JP2010/000743 WO 20100208
- 国际公布: WO2010/092787 WO 20100819
- 主分类号: C23C16/26
- IPC分类号: C23C16/26 ; C23C16/44 ; B82Y40/00 ; C01B31/02 ; B01J15/00 ; B01J19/08 ; B01J19/12 ; B01J19/22 ; B82Y30/00 ; C23C16/46
摘要:
An apparatus of the present invention for producing aligned carbon nanotube aggregates is an apparatus for producing aligned carbon nanotube aggregates, the apparatus being configured to grow the aligned carbon nanotube aggregate by: causing a catalyst formed on a surface of a substrate to be surrounded by a reducing gas environment constituted by a reducing gas; heating at least either the catalyst or the reducing gas; causing the catalyst to be surrounded by a raw material gas environment constituted by a raw material gas; and heating at least either the catalyst or the raw material gas, at least either an apparatus component exposed to the reducing gas or an apparatus component exposed to the raw material gas being made from a heat-resistant alloy, and having a surface plated with molten aluminum.
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