Invention Grant
- Patent Title: Dual use of a ring structure as gyroscope and accelerometer
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Application No.: US14531123Application Date: 2014-11-03
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Publication No.: US09599471B2Publication Date: 2017-03-21
- Inventor: Gaurav Vohra , Jeffrey A. Gregory
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5698 ; G01C19/5684 ; G01P15/097 ; G01P15/125 ; G01P15/18

Abstract:
Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.
Public/Granted literature
- US20160153779A1 Dual Use of a Ring Structure as Gyroscope and Accelerometer Public/Granted day:2016-06-02
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