Invention Grant
- Patent Title: Laser SDE effect compensation by adaptive tuning
-
Application No.: US15060576Application Date: 2016-03-03
-
Publication No.: US09601311B2Publication Date: 2017-03-21
- Inventor: Ying Luo , KuoFeng Tseng , Zhonghua Dong
- Applicant: Hermes Microvision Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION INC.
- Current Assignee: HERMES MICROVISION INC.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/28
Abstract:
Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.
Public/Granted literature
- US20160260579A1 Laser SDE Effect Compensation by Adaptive Tuning Public/Granted day:2016-09-08
Information query
