公开(公告)号：US09601311B2

公开(公告)日：2017-03-21

申请号：US15060576

申请日：2016-03-03

Applicant: Hermes Microvision Inc.

Inventor： Ying Luo ,  KuoFeng Tseng ,  Zhonghua Dong

IPC: H01J37/00 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/20292 ,  H01J2237/2817

Abstract: Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.

公开(公告)号：US20160260579A1

公开(公告)日：2016-09-08

申请号：US15060576

申请日：2016-03-03

Applicant: Hermes Microvision Inc.

Inventor： Ying Luo ,  KuoFeng Tseng ,  Zhonghua Dong

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/20292 ,  H01J2237/2817

Abstract: Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.

Abstract translation: 通过使用自适应调谐来补偿激光分割误差（SDE）效应。 该补偿信号可以应用于电子束检测工具中的位置检测，特别是对于连续移动阶段。