- 专利标题: Semiconductor device having asymmetric fin-shaped pattern
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申请号: US14983904申请日: 2015-12-30
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公开(公告)号: US09601628B2公开(公告)日: 2017-03-21
- 发明人: Jung-Gun You , Se-Wan Park , Baik-Min Sung , Bo-Cheol Jeong
- 申请人: Jung-Gun You , Se-Wan Park , Baik-Min Sung , Bo-Cheol Jeong
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 代理机构: Ward and Smith, P.A.
- 优先权: KR10-2015-0007315 20150115
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/78 ; H01L27/088 ; H01L21/762 ; H01L21/311
摘要:
Semiconductor devices are provided including a first fin-shaped pattern having first and second sidewalls facing one another and a field insulating film contacting at least a portion of the first fin-shaped pattern. The first fin-shaped pattern includes a lower portion of the first fin-shaped pattern contacting the field insulating film; an upper portion of the first fin-shaped pattern not contacting the field insulating film; a first boundary between the lower portion of the first fin-shaped pattern and the upper portion of the first fin-shaped pattern; and a first fin center line perpendicular to the first boundary and meeting the top of the upper portion of the first fin-shaped pattern. The first sidewall of the upper portion of the first fin-shaped pattern and the second sidewall of the upper portion of the first fin-shaped pattern are asymmetric with respect to the first fin center line.
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