Material treatment is effected in a treatment region by at least two energy sources, such as (i) an atmospheric pressure (AP) plasma and (ii) an ultraviolet (UV) laser directed into the plasma and optionally onto the material being treated. During processing, the material being treated may remain substantially at room temperature. Precursor materials may be dispensed before, and finishing material may be dispensed after treatment. Precursors may be combined in the plasma, allowing for in situ synthesis and dry treatment of the material. Electrodes (e1, e2) for generating the plasma may comprise two spaced-apart rollers which, when rotating, advance the material through a treatment region. Nip rollers adjacent the electrode rollers define a semi-airtight cavity, and may have a metallic outer layer. Loose fibers and fragile membranes may be supported on a carrier membrane, which may be doped. Individual fibers may be processed. Electrostatic deposition may be performed. Topographical changes may be effected. Various laser configurations and parameters are disclosed.