- 专利标题: Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe
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申请号: US14119953申请日: 2012-05-24
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公开(公告)号: US09605940B2公开(公告)日: 2017-03-28
- 发明人: Helmut Fischer
- 申请人: Helmut Fischer
- 申请人地址: DE Sindelfingen
- 专利权人: Helmut Fischer GbmH Institut für Elektronik und Messtechnik
- 当前专利权人: Helmut Fischer GbmH Institut für Elektronik und Messtechnik
- 当前专利权人地址: DE Sindelfingen
- 代理机构: Renner, Otto, Boisselle and Sklar LLP
- 优先权: DE102011103122 20110525; DE102011103123 20110525
- 国际申请: PCT/EP2012/059691 WO 20120524
- 国际公布: WO2012/160132 WO 20121129
- 主分类号: G01B7/06
- IPC分类号: G01B7/06
摘要:
The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.
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