Invention Grant
- Patent Title: Probe card and method for testing magnetic sensors
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Application No.: US14687490Application Date: 2015-04-15
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Publication No.: US09606144B2Publication Date: 2017-03-28
- Inventor: Lianjun Liu , Phillip Mather
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff McAndrews, PLLC
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/073 ; G01R35/00 ; G01R33/00 ; G01R33/09

Abstract:
A probe card and method are provided for testing magnetic sensors at the wafer level. The probe card has one or more probe tips having a first pair of solenoid coils in parallel configuration on first opposed sides of each probe tip to supply a magnetic field in a first (X) direction, a second pair of solenoid coils in parallel configuration on second opposed sides of each probe tip to supply a magnetic field in a second (Y) direction orthogonal to the first direction, and an optional third solenoid coil enclosing or inscribing the first and second pair to supply a magnetic field in a third direction (Z) orthogonal to both the first and second directions. The first pair, second pair, and third coil are each symmetrical with a point on the probe tip array, the point being aligned with and positioned close to a magnetic sensor during test.
Public/Granted literature
- US20150219689A1 PROBE CARD AND METHOD FOR TESTING MAGNETIC SENSORS Public/Granted day:2015-08-06
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