Invention Grant
- Patent Title: Scanning transmission electron microscope having multiple beams and post-detection image correction
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Application No.: US14745634Application Date: 2015-06-22
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Publication No.: US09607804B2Publication Date: 2017-03-28
- Inventor: Rudolf M. Tromp
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/22 ; H01J37/28

Abstract:
Embodiments are further directed to an information processing system for generating a corrected image of a sample. The system includes a detector, a memory communicatively coupled to the detector, and a post-detection image processor communicatively coupled to the memory and the detector. The system is configured to perform a method that includes detecting, by the detector, data of a plurality of moving particles, wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, and wherein the uncorrected image includes defocus, astigmatism and spherical aberration. The method further includes generating, by the post-detection image processor, a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.
Public/Granted literature
- US20160300688A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND POST-DETECTION IMAGE CORRECTION Public/Granted day:2016-10-13
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