Invention Grant
- Patent Title: Adjustable dummy fill
-
Application No.: US14230847Application Date: 2014-03-31
-
Publication No.: US09619606B2Publication Date: 2017-04-11
- Inventor: Scott R. Summerfelt , Robert G. Fleck
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Rose Alyssa Keagy; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/44
- IPC: H01L21/44 ; G06F17/50 ; H01L21/66 ; H01L27/02 ; H01L27/11507
Abstract:
A method of placing a dummy fill layer on a substrate is disclosed (FIG. 2). The method includes identifying a sub-region of the substrate (210). A density of a layer in the sub-region is determined (212). A pattern of the dummy fill layer is selected to produce a predetermined density (216). The selected pattern is placed in the sub-region (208).
Public/Granted literature
- US20140215425A1 ADJUSTABLE DUMMY FILL Public/Granted day:2014-07-31
Information query
IPC分类:
