Invention Grant
- Patent Title: Bonding head and die bonding apparatus having the same
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Application No.: US14532190Application Date: 2014-11-04
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Publication No.: US09620476B2Publication Date: 2017-04-11
- Inventor: Hang Lim Lee , Jong Jin Weon , Soon Hyun Kim , Seung Dae Seok
- Applicant: SEMES CO., LTD. , SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Cheonan-si, Chungcheongnam-Do KR Suwon-si, Gyeonggi-Do
- Assignee: SEMES CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SEMES CO., LTD.,SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Cheonan-si, Chungcheongnam-Do KR Suwon-si, Gyeonggi-Do
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2013-0137304 20131113
- Main IPC: B32B37/00
- IPC: B32B37/00 ; H01L23/00 ; H01L21/683

Abstract:
A bonding head and a die bonding apparatus having the same are disclosed. The bonding head includes a body connected to a driving section for transferring the die, a plate heater mounted to a lower surface of the body and a collet mounted to a lower surface of the plate heater and configured to hold the die using a vacuum pressure. A cooling channel is formed at the lower surface of the body, and cooling passages are formed through the body and connected with the cooling channel to supply a cooling fluid into the cooling channel and to recover the cooling fluid from the cooling channel thereby cooling the plate heater.
Public/Granted literature
- US20150129135A1 BONDING HEAD AND DIE BONDING APPARATUS HAVING THE SAME Public/Granted day:2015-05-14
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