公开(公告)号：US20240360634A1

公开(公告)日：2024-10-31

申请号：US18643124

申请日：2024-04-23

申请人： SEMES CO., LTD.

发明人： Hyuksoon Im

IPC分类号： E01D19/10 ,  B66F11/04

CPC分类号： E01D19/106 ,  B66F11/044

摘要： A walkway structure includes a first frame spaced apart from the ground in a vertical direction and extending in a first horizontal direction, a footboard located on a side surface of the first frame and comprising at least one first hole, at least one bracket coupled to the footboard and the first frame, and a first coupler configured to couple the bracket to the first frame, wherein the bracket includes a first plate coupled to the footboard, a second plate coupled to the first plate, and a third plate coupled to the second plate, wherein a lower surface of the third plate is in contact with an upper surface of the first frame.

公开(公告)号：US12131918B2

公开(公告)日：2024-10-29

申请号：US17667459

申请日：2022-02-08

申请人： SEMES CO., LTD.

发明人： Sang Min Lee ,  Seung Hoon Oh ,  Yong Joon Im ,  Hyo Won Yang

IPC分类号： H01L21/67 ,  B08B3/04 ,  F26B5/00

CPC分类号： H01L21/67028 ,  H01L21/67023 ,  B08B3/04 ,  F26B5/005 ,  H01L21/6719

摘要： A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.

公开(公告)号：US12112960B2

公开(公告)日：2024-10-08

申请号：US17474469

申请日：2021-09-14

申请人： SEMES CO., LTD.

发明人： Ohyeol Kwon ,  Soo Yeon Shin ,  Hyun Hoo Kim ,  Myung Chan Cho

IPC分类号： G06T7/00 ,  G06N3/045 ,  H01L21/67

CPC分类号： H01L21/67253 ,  G06N3/045 ,  G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

摘要： The inventive concept provides a method to determine whether a substrate treatment process is normal using a deep learning model. The method comprising receiving input on a substrate treatment process video, preprocessing the inputted video, using the deep learning model to study a preprocessed video, and determining whether the substrate treatment process is normal by comparing the trained model and a real time substrate treatment process video.

公开(公告)号：US20240316923A1

公开(公告)日：2024-09-26

申请号：US18439488

申请日：2024-02-12

申请人： SEMES CO., LTD.

发明人： Sang Hyun PARK ,  Moo Hyung YI ,  Sung Ho CHOI

IPC分类号： B41J2/07 ,  B41J29/38

CPC分类号： B41J2/07 ,  B41J29/38

摘要： The present disclosure provides a method and apparatus for forming a film, capable of for forming a film on an image in which a plurality of shapes overlap, wherein the method for forming a film includes setting a first shape within a target region; setting a second shape, at least partially overlapping the first shape; setting an edge processing profile applied to an edge portion of the first shape and an edge portion of the second shape; and forming a film on the edge portion of the first shape and the edge portion of the second shape, based on the edge processing profile.

公开(公告)号：US12097525B2

公开(公告)日：2024-09-24

申请号：US17960394

申请日：2022-10-05

申请人： SEMES CO., LTD.

发明人： Cheon Su Cho

IPC分类号： B05C11/00 ,  B05C5/02

CPC分类号： B05C11/00 ,  B05C5/0208

摘要： The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a head unit configured to discharge an ink to a substrate; a supply unit configured to supply the ink to the head unit and including a reservoir having an inner space; and a pressure adjusting unit configured to adjust a pressure of the inner space, and wherein the pressure adjusting unit comprises: a first pressure adjusting unit; and a second pressure adjusting unit in which a size for changing a pressure of the inner space per unit time is greater than the first pressure adjusting unit.

公开(公告)号：US12094706B2

公开(公告)日：2024-09-17

申请号：US17901904

申请日：2022-09-02

申请人： SEMES CO., LTD.

发明人： Myung Chan Cho

IPC分类号： H01L21/02 ,  H01L21/67

CPC分类号： H01L21/02101 ,  H01L21/67023 ,  H01L21/67109 ,  H01L21/67248

摘要： Provided is a substrate treating method. The substrate treating method includes: a first supercritical processing operation of loading a first substrate into a supercritical chamber and supercritically processing the first substrate in the supercritical chamber; a resting operation of maintaining the supercritical chamber in an empty state for a first time until a temperature in the supercritical chamber becomes a preset temperature by opening the supercritical chamber after the first substrate is unloaded from the supercritical chamber; and a second supercritical processing operation of loading a second substrate into the supercritical chamber and supercritically processing the second substrate in the supercritical chamber.

公开(公告)号：US12082313B2

公开(公告)日：2024-09-03

申请号：US17531798

申请日：2021-11-21

申请人： SEMES CO., LTD.

发明人： Soon Hyun Kim ,  Byung Geun Kim ,  Byoung Chan Lee

IPC分类号： H01L21/67 ,  F28D21/00 ,  H01L21/683 ,  H05B1/02 ,  H05B3/06

CPC分类号： H05B1/0233 ,  F28D21/0015 ,  H01L21/67144 ,  H05B3/06 ,  H01L21/6838

摘要： A heater assembly includes a housing having an accommodation space therein and having a cooling gas inlet communicating with the accommodation space, a heater coupled to the housing, and a porous block disposed in the accommodation space.

公开(公告)号：US20240281313A1

公开(公告)日：2024-08-22

申请号：US18582808

申请日：2024-02-21

申请人： SEMES CO., LTD.

发明人： Hojune LEE ,  Donghyun JUN

IPC分类号： G06F11/07 ,  G06F11/30

CPC分类号： G06F11/0751 ,  G06F11/3072

摘要： An operating method of a system for analyzing abnormal data includes generating an anomaly detection model by using a training data set including a plurality of pieces of multivariate time-series data, comparing first time-series data input to the anomaly detection model with second time-series data output from the anomaly detection model through an operation on the first time-series data, determining whether or not the first time-series data includes abnormal data, on the basis of the comparison between the first time-series data and the second time-series data, comparing a first plurality of data elements included in the first time-series data with a second plurality of data elements included in the second time-series data, and detecting at least one data element on the basis of a result of comparing the first plurality of data elements with the second plurality of data elements.

公开(公告)号：US12046466B2

公开(公告)日：2024-07-23

申请号：US17965911

申请日：2022-10-14

申请人： SEMES CO., LTD.

发明人： Yong-Jun Seo ,  Hyun Yoon ,  Jungsuk Goh ,  Byeong Geun Kim ,  Yoonki Sa ,  Doyeon Kim ,  Yerim Yeon ,  Choonghyun Lee ,  Pil Kyun Heo ,  Youngje Um ,  Jaeseong Lee ,  Dongok Ahn

IPC分类号： H01L21/02 ,  H01L21/67

CPC分类号： H01L21/02101 ,  H01L21/6715

摘要： The inventive concept provides a method for treating a substrate. In an embodiment, the substrate treating method includes a treatment step of treating a residue on the substrate with a first fluid in a supercritical state and a second fluid in a supercritical state in a process space of a chamber, and the first fluid in the supercritical state and the second fluid in the supercritical state have different densities.

公开(公告)号：US20240222174A1

公开(公告)日：2024-07-04

申请号：US18395570

申请日：2023-12-24

申请人： SEMES CO., LTD.

发明人： Seul Gi CHOI ,  Jun Hyun LIM ,  Young Jin JANG ,  Eun Jung LEE ,  Hee Jun YOUN ,  Gui Su PARK

IPC分类号： H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67712 ,  H01L21/67057 ,  H01L21/67706

摘要： Proposed is a substrate transferring apparatus, and a liquid processing apparatus and substrate processing equipment including the same, which prevent a pattern leaning phenomenon during a substrate processing process. The substrate transferring apparatus that transfers substrates between cleaning tanks in the batch-type liquid processing apparatus includes a rail extended on a ceiling of a first cleaning tank in which a first processing liquid is stored and a second cleaning tank in which a second processing liquid is stored, a crane moving along the rail, and a vessel configured to be moved vertically by the crane. The vessel may include a first sub vessel and a second sub vessel that combine with each other to form a space for accommodating a substrate immersed in the first processing liquid.