Invention Grant
- Patent Title: Methods of forming alternative channel materials on a non-planar semiconductor device and the resulting device
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Application No.: US14197790Application Date: 2014-03-05
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Publication No.: US09627245B2Publication Date: 2017-04-18
- Inventor: Ajey Poovannummoottil Jacob , Bruce Doris , Kangguo Cheng , Nicolas Loubet
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation , STMicroelectronics, Inc.
- Applicant Address: KY Grand Cayman US NY Armonk US TX Coppell
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation,STMicroelectronics, Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation,STMicroelectronics, Inc.
- Current Assignee Address: KY Grand Cayman US NY Armonk US TX Coppell
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/66 ; H01L29/78 ; H01L29/49 ; H01L29/51 ; H01L29/04 ; H01L29/165

Abstract:
One illustrative method disclosed herein involves, among other things, forming trenches to form an initial fin structure having an initial exposed height and sidewalls, forming a protection layer on at least the sidewalls of the initial fin structure, extending the depth of the trenches to thereby define an increased-height fin structure, with a layer of insulating material over-filling the final trenches and with the protection layer in position, performing a fin oxidation thermal anneal process to convert at least a portion of the increased-height fin structure into an isolation material, removing the protection layer, and performing an epitaxial deposition process to form a layer of semiconductor material on at least portions of the initial fin structure.
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