- 专利标题: Method for manufacturing semiconductor device
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申请号: US14959139申请日: 2015-12-04
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公开(公告)号: US09627350B2公开(公告)日: 2017-04-18
- 发明人: Yasunari Hino , Daisuke Kawabata
- 申请人: Mitsubishi Electric Corporation
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Studebaker & Brackett PC
- 优先权: JP2015-092616 20150430
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/00
摘要:
A method for manufacturing a semiconductor device according to the present invention includes: (a) disposing, on a substrate (insulating substrate), a bonding material having a sheet shape and having sinterability; (b) disposing a semiconductor element on the bonding material after the (a); and (c) sintering the bonding material while applying pressure to the bonding material between the substrate and the semiconductor element. The bonding material includes particles of Ag or Cu, and the particles are coated with an organic film.
公开/授权文献
- US20160322327A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 公开/授权日:2016-11-03
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